Koshi
Japan
4
2011-09-29
The entities that hold a legal rights for patent applications filed by inventor Shinya Hiroshi:
Hiroshi Shinya from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Heat processing apparatus and heat processing method
#2 | 2010-09-02Substrate processing apparatus and substrate processing method
#3 | 2007-07-26Heat processing apparatus and heat processing method
#4 | 2007-03-01Substrate processing apparatus and substrate processing method
6191670 ⎘