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Inventor profile of:

Noritaka Uchida

City:

Koshi

Country:

Japan

Published Applications:

6

Last publication date:

2018-07-19

Top Assignees for applications by Noritaka Uchida

The entities that hold a legal rights for patent applications filed by inventor Uchida Noritaka:

  • TOKYO ELECTRON LIMITED 6 Tokyo, Japan
  • TOKYO ELECTRON LIMITED 1 Tokyo-To, Japan

Recent patent applications by Uchida Noritaka

Noritaka Uchida from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2018-07-19
US20180200764A1
Performing operations; transporting

Substrate processing apparatus, substrate processing method and recording medium

#2 | 2011-12-22
US20110312247A1
Performing operations; transporting

Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrate

#3 | 2010-12-09
US20100307543A1
Electricity

Substrate processing method and substrate processing apparatus

#4 | 2007-09-27
US20070223342A1
Mechanical engineering

Substrate processing method and substrate processing apparatus

#5 | 2007-05-24
US20070113872A1
Electricity

Liquid processing method and liquid processing apparatus

#6 | 2007-01-25
US20070017555A1
Electricity

Substrate processing method and substrate processing apparatus

InventorID:

6199587 ⎘

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