Koshi
Japan
6
2018-07-19
The entities that hold a legal rights for patent applications filed by inventor Uchida Noritaka:
Noritaka Uchida from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus, substrate processing method and recording medium
#2 | 2011-12-22Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrate
#3 | 2010-12-09Substrate processing method and substrate processing apparatus
#4 | 2007-09-27Substrate processing method and substrate processing apparatus
#5 | 2007-05-24Liquid processing method and liquid processing apparatus
#6 | 2007-01-25Substrate processing method and substrate processing apparatus
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