Jun Sato

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2015-11-19

Top Assignees for applications by Jun Sato

The entities that hold a legal rights for patent applications filed by inventor Sato Jun:

TOKYO ELECTRON LIMITED 7 Tokyo, Japan
Tokyo Electron Limited 3 , Japan
TOKYO ELECTRON LIMITED 1 Tokyo-To, Japan

Recent patent applications by Sato Jun

Jun Sato from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2015-11-19

US20150332917A1

Electricity

Film-forming method for forming silicon oxide film on tungsten film or tungsten oxide film

#2 | 2015-03-26

US20150087161A1

Electricity

Film-forming method for forming silicon oxide film on tungsten film or tungsten oxide film

#3 | 2014-01-02

US20140004713A1

Electricity

Film formation method, film formation apparatus and storage medium

#4 | 2012-06-21

US20120156888A1

Electricity

Slimming method of carbon-containing thin film and oxidation apparatus

#5 | 2011-08-18

US20110201210A1

Chemistry; metallurgy

Film formation method, film formation apparatus, and method for using film formation apparatus

#6 | 2010-11-04

US20100278999A1

Mechanical engineering

Plasma process apparatus and plasma process method

#7 | 2010-07-29

US20100189927A1

Chemistry; metallurgy

Film formation apparatus and method for using same

#8 | 2009-07-16

US20090181548A1

Chemistry; metallurgy

Vertical plasma processing method for forming silicon containing film

#9 | 2009-05-14

US20090124083A1

Chemistry; metallurgy

Film formation apparatus and method for using same

#10 | 2009-05-07

US20090117743A1

Chemistry; metallurgy

Film formation apparatus and method for using same

InventorID:

6202559 ⎘