Satoshi Tanaka

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2022-02-10

Top Assignees for applications by Satoshi Tanaka

The entities that hold a legal rights for patent applications filed by inventor Tanaka Satoshi:

TOKYO ELECTRON LIMITED 9 Tokyo, Japan
TOKYO ELECTRON LIMITED 1 Minato-ku, Japan
NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM 1 Aichi, Japan

Recent patent applications by Tanaka Satoshi

Satoshi Tanaka from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2022-02-10

US20220042173A1

Chemistry; metallurgy

Carbon hard mask, film forming apparatus, and film forming method

#2 | 2022-01-13

US20220010424A1

Chemistry; metallurgy

FILM FORMING METHOD AND SEMICONDUCTOR PRODUCTION APPARATUS

#3 | 2016-12-29

US20160379796A1

Electricity

Plasma processing apparatus

#4 | 2012-06-14

US20120145679A1

Electricity

Plasma processing apparatus and plasma processing method

#5 | 2009-01-29

US20090026170A1

Electricity

Plasma processing apparatus and method of plasma distribution correction

#6 | 2008-10-02

US20080236749A1

Electricity

Plasma processing apparatus

#7 | 2007-10-11

US20070235426A1

Electricity

Plasma processing apparatus and plasma processing method

#8 | 2007-10-04

US20070227665A1

Electricity

Plasma processing method and plasma processing apparatus

#9 | 2007-10-04

US20070227664A1

Electricity

Plasma processing apparatus and plasma processing method

#10 | 2007-09-27

US20070224817A1

Electricity

Plasma processing apparatus, plasma processing method, and storage medium

InventorID:

6203217 ⎘