Tetsuji Sato

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2011-07-07

Top Assignees for applications by Tetsuji Sato

The entities that hold a legal rights for patent applications filed by inventor Sato Tetsuji:

TOKYO ELECTRON LIMITED 7 Tokyo, Japan
TOKYO ELECTRON LIMITED 4 Minato-ku, Japan

Recent patent applications by Sato Tetsuji

Tetsuji Sato from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2011-07-07

US20110162678A1

Mechanical engineering

Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component

#2 | 2011-05-19

US20110116207A1

Electricity

Substrate mounting table of substrate processing apparatus

#3 | 2010-10-19

US10802811

Plasma processing apparatus

#4 | 2009-05-28

US20090136336A1

Mechanical engineering

Exhaust system and exhausting pump connected to a processing chamber of a substrate processing apparatus

#5 | 2008-01-10

US20080006207A1

Electricity

Heat-transfer structure and substrate processing apparatus

#6 | 2006-11-16

US20060257243A1

Mechanical engineering

#7 | 2006-09-07

US20060196847A1

Electricity

Plasma processing method and apparatus

InventorID:

6204445 ⎘