Kazuo Terada

City:

Koshi

Country:

Japan

Published Applications:

Last publication date:

2011-01-06

Top Assignees for applications by Kazuo Terada

The entities that hold a legal rights for patent applications filed by inventor Terada Kazuo:

Kazuo Terada from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate processing apparatus and substrate processing method

Supercritical processing apparatus, substrate processing system and supercritical processing method

Substrate carrying apparatus having circumferential sidewall and substrate processing system

Substrate treatment apparatus

Heating apparatus and heating method

Heating device, coating and developing system, heating method and storage medium

Heat treatment device

InventorID:

6209697 ⎘