Koshi
Japan
3
2012-03-22
The entities that hold a legal rights for patent applications filed by inventor Doki Yuichi:
Yuichi Doki from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing system, substrate placing position adjusting method and storage medium
#2 | 2009-02-26Method of adjusting moving position of transfer arm and position detecting jig
#3 | 2008-05-01Substrate processing system, substrate placing position adjusting method and storage medium
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