Thomas Stein

City:

Oberkocken

Country:

Germany

Published Applications:

Last publication date:

2008-06-19

Top Assignees for applications by Thomas Stein

The entities that hold a legal rights for patent applications filed by inventor Stein Thomas:

ASML Netherlands B.V. 1 Veldhoven, Netherlands
Carl Zeiss SMT GmbH 1 Oberkochen, Germany
Carl Zeis SMT AG 1 Oberkochen, Germany

Recent patent applications by Stein Thomas

Thomas Stein from Oberkocken, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2008-06-19

US20080143981A1

Physics

Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element

InventorID:

6222205 ⎘