Oshu
Japan
3
2013-08-08
The entities that hold a legal rights for patent applications filed by inventor Abe Yo:
Yo Abe from Oshu, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Thermal processing apparatus, thermal processing method, and storage medium
#2 | 2010-03-04Thermal processing apparatus, thermal processing method, and storage medium
#3 | 2008-09-25Substrate transfer apparatus, substrate transfer method, and storage medium
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