Ulm
Germany
3
2016-04-21
The entities that hold a legal rights for patent applications filed by inventor Schönhoff Ulrich:
Ulrich Schönhoff from Ulm, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus, positioning system for use in a lithographic apparatus and method
#2 | 2011-11-10Lithographic apparatus and thermal optical manipulator control method
#3 | 2009-02-19Lithographic apparatus and thermal optical manipulator control method
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