Nirasaki
Japan
9
2023-01-19
The entities that hold a legal rights for patent applications filed by inventor You Gen:
Gen You from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Etching method and etching apparatus
#2 | 2022-12-01Etching method and etching apparatus
#3 | 2022-01-20Etching method and etching apparatus
#4 | 2014-09-11Supercritical drying method for semiconductor substrate and supercritical drying apparatus
#5 | 2014-01-23Substrate processing method and storage medium
#6 | 2013-01-24Supercritical drying method for semiconductor substrate and supercritical drying apparatus
#7 | 2012-12-06Substrate processing method, substrate processing apparatus, and storage medium
#8 | 2012-10-04Supercritical drying method and apparatus for semiconductor substrates
#9 | 2009-02-26Substrate processing method and computer storage medium
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