Koshi
Japan
12
2023-06-15
The entities that hold a legal rights for patent applications filed by inventor Douki Yuichi:
Yuichi Douki from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus and substrate processing method
#2 | 2021-08-26Substrate liquid processing apparatus and liquid discharge evaluation method
#3 | 2018-08-09Substrate processing apparatus, substrate processing method and recording medium
#4 | 2017-01-19Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium
#5 | 2014-08-21Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position
#6 | 2013-08-08Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium
#7 | 2013-08-08Substrate processing apparatus, substrate processing method and non-transitory storage medium
#8 | 2012-09-06Substrate holder positioning method and substrate processing system
#9 | 2012-03-15Coating and developing apparatus, coating and developing method and non-transitory tangible medium
#10 | 2012-03-08Coating and developing apparatus, coating and developing method and non-transitory tangible medium
#11 | 2010-08-19Substrate transfer apparatus and substrate treatment system
#12 | 2007-11-29Substrate transfer apparatus, substrate process system, and substrate transfer method
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