Suwon
South Korea
3
2011-06-30
The entities that hold a legal rights for patent applications filed by inventor Kim Minshik:
Minshik Kim from Suwon, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma reactor and etching method using the same
#2 | 2011-04-07Side gas injector for plasma reaction chamber
#3 | 2011-03-10Workpiece de-chucking device of plasma reactor for dry-cleaning inside of reaction chamber and electrostatic chuck during workpiece de-chucking, and workpiece de-chucking method using the same
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