Nirasaki
Japan
6
2021-12-02
The entities that hold a legal rights for patent applications filed by inventor Kikama Eiji:
Eiji Kikama from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus and substrate processing method
#2 | 2019-09-05Film-forming method and film-forming apparatus
#3 | 2019-06-20Vertical heat treatment apparatus
#4 | 2019-05-02Method of forming blocking silicon oxide film, and storage medium
#5 | 2019-03-14Method and apparatus for forming silicon oxide film, and storage medium
#6 | 2011-08-18Film formation method, film formation apparatus, and method for using film formation apparatus
6273878 ⎘