Nirasaki
Japan
3
2012-01-05
The entities that hold a legal rights for patent applications filed by inventor Fujihara Jin:
Jin Fujihara from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus
#2 | 2012-01-05Substrate stage, substrate processing apparatus and substrate processing system
#3 | 2010-03-04Plasma processing method and resist pattern modifying method
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