Junji Oikawa

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2010-09-23

Top Assignees for applications by Junji Oikawa

The entities that hold a legal rights for patent applications filed by inventor Oikawa Junji:

Junji Oikawa from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate processing apparatus and exhaust method therefor

Substrate transfer device and substrate transfer method

Transfer chamber and method for preventing adhesion of particle

InventorID:

6281887 ⎘