Nirasaki
Japan
6
2014-09-11
The entities that hold a legal rights for patent applications filed by inventor Sawada Ikuo:
Ikuo Sawada from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium
#2 | 2014-05-22Plasma processing apparatus, plasma processing method and storage medium
#3 | 2012-06-28Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein
#4 | 2011-07-21Plasma processing apparatus and method
#5 | 2010-04-15Film deposition apparatus and film deposition method
#6 | 2010-01-14Plasma processing apparatus, plasma processing method and storage medium
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