Nirasaki
Japan
3
2014-02-20
The entities that hold a legal rights for patent applications filed by inventor Oyabu Jun:
Jun Oyabu from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus
#2 | 2011-12-29Method of setting thickness of dielectric and substrate processing apparatus having dielectric disposed in electrode
#3 | 2011-12-29Substrate processing method and substrate processing apparatus
6285744 ⎘