Kazuyoshi Eshima

City:

Koshi

Country:

Japan

Published Applications:

Last publication date:

2015-12-31

Top Assignees for applications by Kazuyoshi Eshima

The entities that hold a legal rights for patent applications filed by inventor Eshima Kazuyoshi:

TOKYO ELECTRON LIMITED 4 Tokyo, Japan
TOKYO ELECTRON LIMITED 2 Minato-ku, Japan

Recent patent applications by Eshima Kazuyoshi

Kazuyoshi Eshima from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2015-12-31

US20150380280A1

Electricity

Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system

#2 | 2013-08-29

US20130223180A1

Performing operations; transporting

Liquid processing apparatus, liquid processing method, and storage medium that stores computer program for implementing liquid processing method

#3 | 2012-03-15

US20120063754A1

Electricity

Liquid heating unit, liquid processing apparatus including the same, and liquid processing method

#4 | 2011-03-17

US20110061683A1

Electricity

Liquid processing apparatus for substrate, method for generating processing liquid, and computer readable recording medium storing program for generating processing liquid therein

#5 | 2011-03-10

US20110056512A1

Performing operations; transporting

Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method

#6 | 2010-11-18

US20100288313A1

Electricity

Cleaning apparatus, substrate processing system, cleaning method, program and storage medium

InventorID:

6307101 ⎘