Koshi
Japan
6
2018-10-25
The entities that hold a legal rights for patent applications filed by inventor Sunaka Ikuo:
Ikuo Sunaka from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Processing apparatus, abnormality detection method, and storage medium
#2 | 2017-06-22Substrate transfer method and storage medium
#3 | 2016-06-16Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container
#4 | 2015-10-22Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium
#5 | 2014-06-26Substrate transfer apparatus, substrate transfer method, and storage medium
#6 | 2012-05-31Substrate treatment system, substrate treatment method, and non-transitory computer storage medium
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