Oshu
Japan
5
2018-11-22
The entities that hold a legal rights for patent applications filed by inventor Wamura Yu:
Yu Wamura from Oshu, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Output inspection method for ozone mass flow controller
#2 | 2016-08-04Method of detoxifying exhaust pipe and film forming apparatus
#3 | 2015-01-15Semiconductor device manufacturing method and substrate treatment system
#4 | 2014-03-27Plasma processing apparatus and plasma processing method
#5 | 2013-08-08Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor
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