Nirasaki
Japan
6
2014-09-25
The entities that hold a legal rights for patent applications filed by inventor Obu Tomoyuki:
Tomoyuki Obu from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Stacked semiconductor device, and method and apparatus of manufacturing the same
#2 | 2014-07-03Method of forming silicon film
#3 | 2014-07-03Method of forming seed layer, method of forming silicon film, and film forming apparatus
#4 | 2014-03-20Method of forming laminated film and forming apparatus thereof
#5 | 2014-01-09Method and apparatus of forming carbon film
#6 | 2014-01-02Silicon oxide film forming method and apparatus
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