Milpitas, California
United States
16
2019-10-03
The entities that hold a legal rights for patent applications filed by inventor CHEN Chen-An:
Chen-An CHEN from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Non-permeable substrate carrier for electroplating
#2 | 2016-04-21NON-PERMEABLE SUBSTRATE CARRIER FOR ELECTROPLATING
#3 | 2014-02-06Non-permeable substrate carrier for electroplating
#4 | 2012-03-29Maintainable substrate carrier for electroplating
#5 | 2012-03-29Non-permeable substrate carrier for electroplating
#6 | 2010-11-04Apparatus and method of aligning and positioning a cold substrate on a hot surface
#7 | 2010-09-02Copper deposition chamber having integrated bevel clean with edge bevel removal detection
#8 | 2007-09-13Copper deposition chamber having integrated bevel clean with edge bevel removal detection
#9 | 2006-04-13Apparatus and method for plasma assisted deposition
#10 | 2006-02-14Apparatus and method for plasma assisted deposition
#11 | 2005-09-29Method for cleaning a process chamber
#12 | 2005-09-13CVD plasma assisted lower dielectric constant SICOH film
#13 | 2005-09-08Heated ceramic substrate support with protective coating
#14 | 2005-07-14CVD plasma assisted lower dielectric constant SICOH film
#15 | 2005-06-07Method for cleaning a process chamber
#16 | 2005-04-21Plating system with integrated substrate inspection
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