Gloucester, Massachusetts
United States
5
2018-05-31
The entities that hold a legal rights for patent applications filed by inventor Stone Stanley W.:
Stanley W. Stone from Gloucester, US has applied for patents for these inventions. The list has both pending applications and granted patents:
System for semiconductor wafer retention and sensing in a vacuum load lock
#2 | 2014-02-06In-vacuum high speed pre-chill and post-heat stations
#3 | 2010-06-24Electrostatic chuck shielding mechanism
#4 | 2005-10-27Automated robot alignment system and method using kinematic pins and end effector sensor
#5 | 2005-10-13Auto-calibration method and device for wafer handler robots
637434 ⎘