Koshi
Japan
3
2016-06-30
The entities that hold a legal rights for patent applications filed by inventor Ueda Kenichi:
Kenichi Ueda from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing method, non-transitory storage medium and heating apparatus
#2 | 2015-12-17Hydrophobization treatment apparatus, hydrophobization treatment method, and hydrophobization treatment recording medium
#3 | 2014-12-11Substrate processing method, substrate processing apparatus, and storage medium
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