Nirasaki
Japan
5
2022-07-14
The entities that hold a legal rights for patent applications filed by inventor Ueda Hirokazu:
Hirokazu Ueda from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing method and plasma processing apparatus
#2 | 2021-03-25Method for forming boron-based film, formation apparatus
#3 | 2019-08-08Method of forming boron-based film, and film forming apparatus
#4 | 2018-06-21Film forming method, boron film, and film forming apparatus
#5 | 2015-11-05Plasma processing apparatus and measurement method
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