Koshi
Japan
5
2021-10-14
The entities that hold a legal rights for patent applications filed by inventor Shimura Satoru:
Satoru Shimura from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate treatment method and substrate treatment system
#2 | 2019-11-21Film forming system, film forming method, and computer storage medium
#3 | 2017-02-02Substrate treatment system
#4 | 2016-11-10Exposure apparatus, resist pattern forming method, and storage medium
#5 | 2015-12-10Film forming method, computer storage medium, and film forming system
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