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Inventor profile of:

Yuki Yoshida

City:

Koshi

Country:

Japan

Published Applications:

9

Last publication date:

2019-04-25

Top Assignees for applications by Yuki Yoshida

The entities that hold a legal rights for patent applications filed by inventor Yoshida Yuki:

TOKYO ELECTRON LIMITED 7 Tokyo, Japan
TOKYO ELECTRON LIMITED 5 Minato-ku, Japan
JSR CORPORATION 1 MINATO-KU, Japan

Recent patent applications by Yoshida Yuki

Yuki Yoshida from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2019-04-25

US20190118227A1

Performing operations; transporting

Substrate processing system, substrate cleaning method, and recording medium

#2 | 2018-03-22

US20180082831A1

Substrate processing apparatus and substrate processing method

#3 | 2018-01-11

US20180012781A1

Substrate processing apparatus

#4 | 2017-02-16

US20170047219A1

Substrate processing apparatus, substrate processing method, and computer-readable recording medium having stored thereon substrate processing program

#5 | 2017-02-09

US20170040154A1

Substrate processing apparatus and substrate processing method

#6 | 2016-02-04

US20160035564A1

Substrate cleaning method and recording medium

#7 | 2016-02-04

US20160035561A1

Substrate processing system, substrate cleaning method, and recording medium

#8 | 2014-12-11

US20140360536A1

Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing program

#9 | 2014-05-22

US20140137902A1

Substrate processing apparatus

InventorID:

6437102 ⎘