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Inventor profile of:

Ulrich Schoenhoff

City:

Ulm

Country:

Germany

Published Applications:

Last publication date:

2026-04-23

Top Assignees for applications by Ulrich Schoenhoff

The entities that hold a legal rights for patent applications filed by inventor Schoenhoff Ulrich:

Carl Zeiss SMT GmbH 6 Oberkochen, Germany
CARL ZEISS SMT AG 2 Oberkochen, Germany
ASML Netherlands B.V. 1 Veldhoven, Netherlands

Recent patent applications by Schoenhoff Ulrich

Ulrich Schoenhoff from Ulm, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-04-23

US20260110974A1

Physics

METHOD FOR CONTROLLING AN OPTICAL MODULE, OPTICAL MODULE AND CONTROL CIRCUIT FOR AN ASSEMBLY OF A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

#2 | 2026-04-02

US20260093188A1

Physics

ASSEMBLY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

#3 | 2026-03-12

US20260072362A1

Physics

SENSOR DEVICE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD FOR OPERATING A SENSOR DEVICE

#4 | 2023-09-07

US20230279919A1

Mechanical engineering

VIBRATION ISOLATOR FOR SUPPORTING A PAYLOAD

#5 | 2021-12-30

US20210405359A1

Physics

Compensation of creep effects in an imaging device

#6 | 2021-12-30

US20210405358A1

Physics

COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE

#7 | 2018-08-30

US20180246416A1

Physics

Optical system, in particular for a microlithographic projection exposure apparatus

#8 | 2014-02-13

US20140043596A1

Physics

Arrangement for actuating an element in a microlithographic projection exposure apparatus

#9 | 2011-04-07

US20110080569A1

Physics

Optical element and method

#10 | 2010-08-12

US20100201958A1

Physics

Optical correction device

#11 | 2009-10-15

US20090257032A1

Physics

Optical element and method

InventorID:

648591 ⎘