Jun Yamashima

City:

Miyagi

Country:

Japan

Published Applications:

Last publication date:

2018-04-19

Top Assignees for applications by Jun Yamashima

The entities that hold a legal rights for patent applications filed by inventor Yamashima Jun:

Jun Yamashima from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus

Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatus

InventorID:

6486331 ⎘