Mitsuhiro Tachibana

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2023-01-19

Top Assignees for applications by Mitsuhiro Tachibana

The entities that hold a legal rights for patent applications filed by inventor Tachibana Mitsuhiro:

TOKYO ELECTRON LIMITED 6 Tokyo, Japan
CENTRAL GLASS CO., LTD. 1 Yamaguchi, Japan

Recent patent applications by Tachibana Mitsuhiro

Mitsuhiro Tachibana from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-01-19

US20230014819A1

Electricity

Etching method and etching apparatus

#2 | 2021-04-08

US20210104412A1

Electricity

Substrate processing method, substrate processing apparatus and substrate processing system

#3 | 2018-07-26

US20180211844A1

Electricity

Naturally oxidized film removing method and naturally oxidized film removing device

#4 | 2017-07-13

US20170200618A1

Electricity

Substrate processing method, substrate processing apparatus and substrate processing system

#5 | 2006-06-20

US10617819

CVD process capable of reducing incubation time

#6 | 2005-07-05

US10181273

Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring

InventorID:

6498239 ⎘