Nirasaki
Japan
3
2022-06-09
The entities that hold a legal rights for patent applications filed by inventor Aita Michitaka:
Michitaka Aita from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Film formation method and film formation device
#2 | 2019-08-22Gas distribution device and processing apparatus
#3 | 2019-03-28Selective film forming method and method of manufacturing semiconductor device
6500619 ⎘