Koshi
Japan
3
2021-01-21
The entities that hold a legal rights for patent applications filed by inventor Muta Tomohiko:
Tomohiko Muta from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus, control method, and computer-readable storage medium
#2 | 2020-11-12Tank, substrate processing apparatus, and method of using the tank
#3 | 2016-04-28Pump, pump device, and liquid supply system
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