Yohei Sano

City:

Koshi

Country:

Japan

Published Applications:

Last publication date:

2023-06-08

Top Assignees for applications by Yohei Sano

The entities that hold a legal rights for patent applications filed by inventor Sano Yohei:

Yohei Sano from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Heat treatment apparatus and heat treatment method

Substrate processing apparatus, substrate processing method and recording medium

Substrate processing apparatus, substrate processing method and computer-readable recording medium

Substrate treatment method and thermal treatment apparatus

InventorID:

6514235 ⎘