Tama
Japan
2
2020-11-19
The entities that hold a legal rights for patent applications filed by inventor Utsuno Mitsuya:
Mitsuya Utsuno from Tama, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
#2 | 2020-01-09Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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