Tachikawa
Japan
5
2023-08-10
The entities that hold a legal rights for patent applications filed by inventor Utsuno Mitsuya:
Mitsuya Utsuno from Tachikawa, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of forming structures using a neutral beam
#2 | 2021-07-22Method of forming high aspect ratio features
#3 | 2021-05-20Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
#4 | 2021-01-21Method of forming structures using a neutral beam
#5 | 2020-04-16Method for etching a carbon-containing feature
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