Suwon-si
South Korea
7
2026-05-07
The entities that hold a legal rights for patent applications filed by inventor Jeang Eunhee:
Eunhee Jeang from Suwon-si, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING APPARATUS
#2 | 2026-02-05EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE AND OPERATING METHOD THEREOF
#3 | 2026-01-01SUBSTRATE STRUCTURE
#4 | 2025-07-24SEMICONDUCTOR PROCESS APPARATUS
#5 | 2025-01-23SEMICONDUCTOR PROCESS APPARATUS
#6 | 2024-05-30EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS
#7 | 2024-02-29Illumination correction apparatus
6584183 ⎘