Hirokazu Ueda

City:

Miyagi

Country:

Japan

Published Applications:

Last publication date:

2014-12-04

Top Assignees for applications by Hirokazu Ueda

The entities that hold a legal rights for patent applications filed by inventor Ueda Hirokazu:

Hirokazu Ueda from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

PLASMA DOPING APPARATUS, PLASMA DOPING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE

Pulsed gas plasma doping method and apparatus

PLASMA EVALUATION METHOD, PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

Plasma doping apparatus and plasma doping method

PLASMA DOPING APPARATUS, PLASMA DOPING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Film forming method using plasma

InventorID:

658630 ⎘