Mountain View, California
United States
6
2014-07-17
The entities that hold a legal rights for patent applications filed by inventor Rogers Matthew S.:
Matthew S. Rogers from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
ELECTRON BEAM PLASMA CHAMBER
#2 | 2013-05-16Method and apparatus for selective nitridation process
#3 | 2013-05-16Interlayer polysilicon dielectric cap and method of forming thereof
#4 | 2013-05-02Surface stabilization process to reduce dopant diffusion
#5 | 2013-02-14Method and apparatus for selective nitridation process
#6 | 2013-01-31Electron beam plasma chamber
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