Milpitas, California
United States
14
2025-07-31
The entities that hold a legal rights for patent applications filed by inventor Shimizu Daisuke:
Daisuke Shimizu from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
CRYOGENIC ETCHING OF SILICON-CONTAINING MATERIALS
#2 | 2023-12-14Method and apparatus for etching a semiconductor substrate in a plasma etch chamber
#3 | 2023-02-23PLASMA CHAMBER WITH A MULTIPHASE ROTATING CROSS-FLOW WITH UNIFORMITY TUNING
#4 | 2022-03-17PLASMA CHAMBER WITH MULTIPHASE ROTATING INDEPENDENT GAS CROSS-FLOW WITH REDUCED VOLUME AND DUAL VHF
#5 | 2021-10-14Methods and apparatus for in-situ protection liners for high aspect ratio reactive ion etching
#6 | 2021-05-13Methods and apparatus for etching semiconductor structures
#7 | 2020-10-01MULTIZONE FLOW DISTRIBUTION SYSTEM
#8 | 2020-09-17Methods and apparatus for etching semiconductor structures
#9 | 2020-03-17Methods and apparatus for etching semiconductor structures
#10 | 2020-03-05Radio frequency (RF) pulsing impedance tuning with multiplier mode
#11 | 2019-11-28SYSTEMS AND METHODS FOR ETCHING OXIDE NITRIDE STACKS
#12 | 2017-04-06RF power delivery with approximated saw tooth wave pulsing
#13 | 2014-03-06Maintaining mask integrity to form openings in wafers
#14 | 2013-01-31Maintaining mask integrity to form openings in wafers
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