Mi-Kyung WOO

City:

Daegu

Country:

South Korea

Published Applications:

Last publication date:

2026-05-07

Top Assignees for applications by Mi-Kyung WOO

The entities that hold a legal rights for patent applications filed by inventor WOO Mi-Kyung:

Mi-Kyung WOO from Daegu, KR has applied for patents for these inventions. The list has both pending applications and granted patents:

BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY WITH HARD MASK FILM CONTAINING CHROME AND NIOBIUM

REVERSE PHOTOMASK THAT PHASE SHIFT FILM PATTERN IS USED FOR REFLECTIVE PATTERN, AND BLANKMASK FOR MANUFACTURING THE SAME

PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY WITH ABSORBING FILM OF CrSb

PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY

BLANKMASK FOR EUV LITHOGRAPHY WITH ABSORBING FILM, AND PHOTOMASK FABRICATED WITH THE SAME

InventorID:

6797780 ⎘