Miyagi
Japan
19
2024-06-06
The entities that hold a legal rights for patent applications filed by inventor HAYASHI Daisuke:
Daisuke HAYASHI from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLASMA STATE DETECTION PROGRAM
#2 | 2021-12-09Structure for automatic in-situ replacement of a part of an electrostatic chuck
#3 | 2021-09-09Plasma processing apparatus
#4 | 2021-03-04Stage and plasma processing apparatus
#5 | 2021-01-21Plasma processing apparatus, plasma state detection method, and plasma state detection program
#6 | 2020-12-31Stage and electrode member
#7 | 2020-08-20Placing table and plasma treatment apparatus
#8 | 2019-11-14Stage and plasma processing apparatus
#9 | 2018-12-27Plasma processing apparatus
#10 | 2018-05-24PLACING UNIT AND PLASMA PROCESSING APPARATUS
#11 | 2017-05-18Placing table and plasma treatment apparatus
#12 | 2016-10-13Temperature control apparatus, temperature control method and recording medium
#13 | 2015-08-27Method of manufacturing electrostatic chuck having dot structure on surface thereof
#14 | 2015-05-14PLACEMENT TABLE AND PLASMA PROCESSING APPARATUS
#15 | 2014-12-04Substrate processing apparatus
#16 | 2014-07-24Mounting table and plasma processing apparatus
#17 | 2014-07-24Bonding method, mounting table and substrate processing apparatus
#18 | 2014-03-13Plasma etching apparatus
#19 | 2012-03-29ELECTRODE AND PLASMA PROCESSING APPARATUS
682065 ⎘