Campbell, California
United States
3
2026-05-07
The entities that hold a legal rights for patent applications filed by inventor Dun Zhiling:
Zhiling Dun from Campbell, US has applied for patents for these inventions. The list has both pending applications and granted patents:
CONTROLLING ARCING WITH SEASON
#2 | 2025-04-10ARC REDUCTION AND RF CONTROL FOR ELECTROSTATIC CHUCKS IN SEMICONDUCTOR PROCESSING
#3 | 2024-12-26SUBSTRATE STRESS UNIFORMITY MANAGEMENT BASED ON OVERLAY ERROR MEASUREMENTS
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