Shigemi Oono

City:

Koshi

Country:

Japan

Published Applications:

Last publication date:

2021-05-13

Top Assignees for applications by Shigemi Oono

The entities that hold a legal rights for patent applications filed by inventor Oono Shigemi:

TOKYO ELECTRON LIMITED 1 Tokyo, Japan

Recent patent applications by Oono Shigemi

Shigemi Oono from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2021-05-13

US20210143033A1

Electricity

Monitoring system for a sealing apparatus having a substrate treatment apparatus in a housing utilizing a laser sensor installed in a space between the housing and the substrate treatment apparatus and that scans a detection region therein

InventorID:

6945073 ⎘