Amit Kumar BANSAL

SYSTEM AND METHOD FOR TAG-DIRECTED DEEP-LEARNING-BASED FEATURES FOR PREDICTING EVENTS AND MAKING DETERMINATIONS

MULTI-DOMAIN FEATURE ENHANCEMENT FOR TRANSFER LEARNING (FTL)

SYSTEM AND METHOD FOR TAG-DIRECTED DEEP-LEARNING-BASED FEATURES FOR PREDICTING EVENTS AND MAKING DETERMINATIONS

Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films

Showerhead assembly with multiple fluid delivery zones

Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films

Dual-channel showerhead for formation of film stacks

External substrate rotation in a semiconductor processing system

Apparatus and method for purging gaseous compounds

Tunable ground planes in plasma chambers

PECVD process

Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber

Chamber design for semiconductor processing

Plasma corrosion resistive heater for high temperature processing

Substrate temperature measurement in multi-zone heater

Wafer rotation in a semiconductor chamber

PECVD apparatus and process

LIGHT IRRADIANCE AND THERMAL MEASUREMENT IN UV AND CVD CHAMBERS

ROTATION ENABLED MULTIFUNCTIONAL HEATER-CHILLER PEDESTAL

PECVD process

Bottom and side plasma tuning having closed loop control

Apparatus and method for purging gaseous compounds

Controlling temperature in substrate processing systems