Meyriez
Switzerland
32
2026-02-12
The entities that hold a legal rights for patent applications filed by inventor Schmid Andreas:
Andreas Schmid from Meyriez, CH has applied for patents for these inventions. The list has both pending applications and granted patents:
BALANCING PROCESS KIT AREA TO WAFER AREA WITHIN A PROCESSING CHAMBER
#2 | 2025-03-13PROCESS KIT ENCLOSURE SYSTEM
#3 | 2025-03-06SEAL ASSEMBLY WITH A RETAINING MECHANISM
#4 | 2025-01-09WAFER EDGE PROFILE CONTROL USING CONNECTED EDGE RING HARDWARE
#5 | 2024-12-26ADJUSTABLE EDGE RING TILT FOR EDGE OF WAFER SKEW COMPENSATION
#6 | 2024-09-26SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
#7 | 2024-04-04FLUID CONDUIT AND FLANGE FOR HIGH BIAS APPLICATIONS
#8 | 2024-01-25SUBSTRATE PROCESSING SYSTEM CARRIER
#9 | 2023-09-07APPARATUS AND METHOD FOR CONTROLLING EDGE RING VARIATION
#10 | 2022-12-22Method and apparatus for determining a position of a ring within a process kit
#11 | 2022-08-18Semiconductor processing with cooled electrostatic chuck
#12 | 2022-06-02Substrate support carrier with improved bond layer protection
#13 | 2022-05-19RING FOR SUBSTRATE EXTREME EDGE PROTECTION
#14 | 2021-12-02ELECTRICAL CONNECTOR FOR COOLED SUBSTRATE SUPPORT ASSEMBLY
#15 | 2021-11-11In-situ apparatus for semiconductor process module
#16 | 2021-11-04COOLED SUBSTRATE SUPPORT ASSEMBLY FOR RADIO FREQUENCY ENVIRONMENTS
#17 | 2021-09-23Substrate support assembly with arc resistant coolant conduit
#18 | 2021-09-23SUBSTRATE PROCESSING SYSTEM CARRIER
#19 | 2021-08-19Apparatus and method for controlling edge ring variation
#20 | 2021-07-15Process kit ring adaptor
#21 | 2021-03-18Cryogenic electrostatic chuck
#22 | 2020-12-17Adjustable thermal break in a substrate support
#23 | 2020-11-26Process kit ring adaptor
#24 | 2020-11-26Process kit enclosure system
#25 | 2020-11-26Substrate support carrier with improved bond layer protection
#26 | 2020-10-22Sensors and system for in-situ edge ring erosion monitor
#27 | 2020-10-22Ring removal from processing chamber
#28 | 2020-07-23Movable and removable process kit
#29 | 2020-06-11Cryogenic electrostatic chuck
#30 | 2019-08-08Cooling element for an electrostatic chuck assembly
#31 | 2019-03-21In-situ apparatus for semiconductor process module
#32 | 2014-03-27WAFER SAWING SYSTEM
699035 ⎘