Eindhoven
Netherlands
14
2019-03-21
The entities that hold a legal rights for patent applications filed by inventor Miranda Marcio Alexandre Cano:
Marcio Alexandre Cano Miranda from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and a method of operating the apparatus
#2 | 2017-10-05Lithographic apparatus and a method of operating the apparatus
#3 | 2017-08-24Lithographic apparatus and device manufacturing method
#4 | 2017-07-27Lithographic apparatus and a device manufacturing method
#5 | 2016-05-05Lithographic apparatus and a method of operating the apparatus
#6 | 2015-04-23Lithographic apparatus and a method of operating the apparatus
#7 | 2014-04-10Lithographic apparatus and device manufacturing method
#8 | 2011-07-28Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
#9 | 2011-01-13Lithographic apparatus and device manufacturing method
#10 | 2011-01-13Fluid handling structure, lithographic apparatus and device manufacturing method
#11 | 2010-11-25Lithographic apparatus and method of operating the apparatus
#12 | 2010-03-18Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure
#13 | 2010-03-18Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
#14 | 2009-12-24Lithographic apparatus and method
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