Bielefeld
Germany
5
2016-12-01
The entities that hold a legal rights for patent applications filed by inventor Bowering Norbert:
Norbert Bowering from Bielefeld, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
EUV optical element having blister-resistant multilayer cap
#2 | 2016-09-22Target material supply apparatus for an extreme ultraviolet light source
#3 | 2014-04-17Target material supply apparatus for an extreme ultraviolet light source
#4 | 2010-05-27Laser produced plasma EUV light source
#5 | 2010-02-04Laser produced plasma euv light source
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