Cyrus E. Tabery

City:

Cupertino, California

Country:

United States

Published Applications:

Last publication date:

2008-04-01

Top Assignees for applications by Cyrus E. Tabery

The entities that hold a legal rights for patent applications filed by inventor Tabery Cyrus E.:

Cyrus E. Tabery from Cupertino, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Scanning laser thermal annealing

Electrical critical dimension measurement and defect detection for reticle fabrication

Feed forward process control using scatterometry for reticle fabrication

Low-temperature post-dopant activation process

Polysilicon tilting to prevent geometry effects during laser thermal annealing

InventorID:

7277010 ⎘