Hirofumi YAMAGUCHI

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2022-10-06

Top Assignees for applications by Hirofumi YAMAGUCHI

The entities that hold a legal rights for patent applications filed by inventor YAMAGUCHI Hirofumi:

TOKYO ELECTRON LIMITED 7 Tokyo, Japan

Recent patent applications by YAMAGUCHI Hirofumi

Hirofumi YAMAGUCHI from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2022-10-06

US20220319877A1

Electricity

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#2 | 2020-10-29

US20200344850A1

Electricity

Substrate processing apparatus and substrate processing method

#3 | 2014-12-04

US20140358271A1

Physics

Processing instructing device, processing instructing method, computer program and processing device

#4 | 2014-04-17

US20140107825A1

Physics

Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit

#5 | 2010-09-09

US20100226737A1

Electricity

Substrate transfer apparatus and substrate transfer method

#6 | 2009-09-10

US20090226294A1

Electricity

Processing system and method for operating the same

#7 | 2009-04-02

US20090087542A1

Electricity

Film position adjusting method, memory medium and substrate processing system

InventorID:

729815 ⎘